MBE Cluster for III-V and metal heterostructures
The Octoplus MBE cluster is a new epitaxial tool dedicated to structures for quantum transport and optics. Comprising two 2" MBE reactors connected by an UHV tunnel, it enables the sequential epitaxial growth of semiconducting heterostructures (including 2DEG and topological insulators) and ferromagnetic and/or superconducting layers, all while preventing air exposure between different growth steps.
III-V Molecular Beam Epitaxy Chamber
Equipped with:
- 8 effusion cells: for Ga, Al, In, Bi, C, and Si
- 1 valved cracker cell: As and soon Sb
- Optical pyrometer for temperature monitoring
- Reflective high-energy electron diffraction (RHEED) system, interfaced for real-time growth monitoring and user-friendly molecular flux calibration
Ferro / Supra Molecular Beam Epitaxy Chamber
Equipped with:
- 6 effusion cells: Ni, Fe, Co, Al, Sb, Bi
- Multipocket e-beam evaporator: Ta, Pt, Nb, Ti, Ag, MgO
- High temperature oven ( > 1200°C)
- LN2 cooled cold finger for low temperature deposition ( < -100°C)
- Mask Station for localized growth
- Optical pyrometer for temperature monitoring (50°C - 1200°C)
- Reflective high-energy electron diffraction (RHEED) system
- Quartz Crystal Microbalance (QCM)
Figure: Ferro / Supra Molecular Beam Epitaxy Chamber
Publications
2026
- C
