MBE Cluster
Molecular Beam Epitaxy cluster
Contacts : Aristide Lemaître, Ulf Gennser, Martina Morassi, Antonella Cavanna, Laurent Travers
Growth of structures for Quantum Transport
The Octoplus MBE cluster is a new epitaxial tool dedicated to structures for quantum transport. Comprising two 2" MBE reactors connected by a UHV tunnel, it enables the sequential epitaxial growth of semiconducting heterostructures (including 2DEG and topological insulators) and the deposition of ferromagnetic and/or superconducting layers, all while preventing air exposure between different growth steps.
The III-V semiconductor reactor, installed by the end of 2025, will be equipped with:
- 8 effusion cells for Ga, Al, In, Bi, C, and Si
- 2 valved cracker cells for As and Sb
- An optical pyrometer for temperature monitoring
- A reflective high-energy electron diffraction (RHEED) system, interfaced for real-time growth monitoring and user-friendly molecular flux calibration
The ferromagnetic/superconductor chamber, already operational, includes:
- 2 effusion cells for Al and Ni
- A multi-pocket e-beam evaporator for Ta, Nb, Co, Pt, and MgO
- A mask station for localized deposition
- A cold finger for low-temperature deposition (down to 100K)
- A quartz balance for flux calibration and real-time flux monitoring
- An optical pyrometer and a type-K thermocouple for temperature monitoring
Figure 2: Masking chamber
Fundings :
